Handbook of Contamination Control in Microelectronics - by Donald L. Tolliver

By Donald L. Tolliver

Covers the fundamentals of infection keep an eye on for the newbie, whereas additionally focusing extensive on severe problems with strategy engineering and circuit production for the extra complicated reader. Stresses to readers that what makes the world of illness keep an eye on specified is its ubiquitous nature, throughout all aspects of semiconductor production. fresh room know-how, well-recognized as a basic requirement in modern-day circuit production, slightly scratches the skin in overall illness regulate.

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Handbook of Contamination Control in Microelectronics - Principles, Applications and Technology

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The pene- in Figures 13 and 14. The most on flow velocity are apparent. 0434 Figure 11: Correlation of filtration data. W. H. Liu, Aerosol Science and Technology, 1, pp. 156. 5 I 25 10 100 u, cm/see Figure 12: Calculated most penetrating particle size as a function of velocity, fiber volume fraction and fiber diameter. 01 through DIAMETER, HEPA filter. pm (Courtesy, Institute of Aerosol T . 0 DIAMETER, ULPA filters. 8 Figure of Merit. Another criterion relative efficiency (or penetration) as a function of merit is given by: (25) f = -log P,IAP (outlet pt = penetration AP = pressure drop.

Liu, Aerosol Science and Technology, 1, pp. 156. 5 I 25 10 100 u, cm/see Figure 12: Calculated most penetrating particle size as a function of velocity, fiber volume fraction and fiber diameter. 01 through DIAMETER, HEPA filter. pm (Courtesy, Institute of Aerosol T . 0 DIAMETER, ULPA filters. 8 Figure of Merit. Another criterion relative efficiency (or penetration) as a function of merit is given by: (25) f = -log P,IAP (outlet pt = penetration AP = pressure drop. concentration/inlet of filter performance is the of pressure drop.

25~1~ = radial coordinate = radius of fiber Rf = filter face velocity U Urn = fluid velocity within filter = U/(1 = packing density = angular coordinate. K r - o) K is called the Kuwabara hydrodynamics factor. r3 This formulation is the basis of the descriptions which follow. 2 Pressure Drop. The relationship between pressure drop and flow is of great practical significance because the amount of energy expended in collecting particles is often as important as the efficiency with which they are collected.

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